Dry Etching and Cleaning Products

Improving Dry Etching with Advanced Semiconductor Solutions

Syensqo's extensive portfolio of polymeric and gaseous solutions for the semiconductor industry improves dry etching tools as well as the cleaning process. With superior resistance to harsh environments and exceptional mechanical properties, our polymer solutions create more efficient components, while our gas portfolio offers environmentally friendly and high-performance alternatives to other methods of cleaning semiconductor parts.  

Polymers

• Fomblin® PFPE - Fomblin® PFPE fluorinated lubricants are ideal in applications that involve aggressive chemical environments, high temperatures or wide working-temperature ranges. They offer unparalleled chemical and solvent resistance, non-reactivity, exceptional radiation hardness, and excellent water washout properties easily formulated into greases, making it the first choice for lubricants used in vacuum pumps for the dry etching process. 
• Galden® PFPE - Galden® PFPE improves dry etching chillers as a family of high-performance dielectric heat transfer fluids. It combines incredible chemical stability with advanced dielectric properties and withstands aggressive conditions prevalent in many industrial applications. Galden® PFPE is available in a variety of grades that meet the demands of the semiconductor market. 
• Tecnoflon® FKM & PFR FFKM - Tecnoflon® FKM & PFR FFKM, used in o-rings, seals, and ESC Chuck, are useful in many industrial applications with exceptional chemical stability, high-performing dielectric properties, and the capacity to operate at very low as well as elevated temperatures in aggressive conditions. With high thermal stability, a broad range of operating temperatures, chemical inertness, and extremely safe qualities, Tecnoflon® FKM & PFR FFKM enhance the dry etching process and semiconductor industry. 
• Ketaspire® PEEK - Ketaspire® PEEK offers the most effective combination of fatigue resistance and chemical resistance when compared with alternatives. It can operate at high temperatures while maintaining excellent mechanical properties, replacing metal in severe end-use environments. It combines top-of-class qualities with ease of processing to make it ideal for etching tools used in structural parts.   
• Torlon® PAI - Torlon® PAI, the highest-performing, melt-processable thermoplastics, is excellent under severe service conditions. These qualities, along with top-notch resistance and wear resistance, make Torlon® PAI an impressive material to use in etching rings for dry etching and cleaning.