Products for CMP

Components to Meet the Rising Needs in CMP 

Syensqo’s advanced polymer solutions for the semiconductor market offer exceptional performance combined with cost-effectiveness. They are known for incredible chemical resistance, dimensional stability, and the ability to withstand high temperatures in many kinds of semiconductor applications.

• Halar® ECTFE - Halar® ECTFE is a lightweight, semi-crystalline, and melt-processable material which offers an extraordinary blend of physical and mechanical properties, including chemical resistance. Its unique structure results in excellent abrasion resistance and incredibly low surface roughness to resist slurry build-up. Halar’s status as an FM 4922 rated material for flame resistance is critical to many structural applications in CMP tools. It also provides exceptional retention of weld strength and resistance to swelling, weight loss, and color changes.
• Solef® PVDF - Solef® is an exceptionally pure, non-reactive thermoplastic. It offers intrinsic chemical stability, fire and oxidation resistance and withstands aggressive environments without degradation. There is no need for additives, fillers, pigments or fire retardants with Solef® PVDF.  
• Ryton® PPS - Ryton® PPS, a semi-crystalline, high-heat polymer, offers a unique combination of properties and cost/performance balance. Its exceptional qualities include dimensional stability, flame-retardance without additives, long-term and short-term thermal stability, high modulus, creep resistance, remarkable chemical resistance to a wide variety of aggressive chemical environments and precision molding to tight tolerances with high reproducibility.
• KetaSpire® PEEK - KetaSpire® PEEK is a high-performance polymer ideal for semiconductor equipment structural materials with benefits including high strength, dimensional stability, best-in-class fatigue resistance, high thermal resistance, ultrahigh purity, optimal creep resistance and extraordinary strength and stiffness.
• AvaSpire® PAEK - AvaSpire® PAEK is a high-performance, cost-effective family of polyketones that offers excellent ductility and toughness, 20% higher tensile elongation at yield and double tensile elongation at break values than similar materials, high stiffness, outstanding chemical resistance and exceptional aesthetics and colorability.
• Torlon® PAI - Torlon® PAI is a family of polyamide-imides that offers advantageous melt-processing qualities combined with high-performance properties, including outstanding strength and wear resistance, high thermal tolerance, remarkable strength retention, dimensional stability, plasma resistance, precision machinability to extremely tight tolerances and extreme chemical resistance.
• Fluorolink® PFPE - Fluorlink® PFPE, a line of versatile fluids based on perfluoropolyether technology is often used to manipulate the wettability of a surface. Its structure consists of a bifunctional perfluoropolyether structure with a high molecular weight and the ability of the functional groups present in the chain to facilitate interaction with substrates, including other polymers.